Posts tagged ‘MEMS’

Teardown of a Piezoelectric Vibrating Gyroscope

Gyroscopes nowadays are based on micro-electro-mechanical systems (MEMS) technology. They are low cost and extremely miniaturized. A device combing both a three-axis gyroscope and a three-axis accelerometers (sometimes these devices are referred to as 6DOF devices) such as the MPU-6500 for example can be had in a QFN package as small as 3 mm x 3 mm and under 1 mm in height. Before these MEMS devices gained mainstream popularity however, larger piezoelectric vibrating gyroscopes were used in many consumer electronics devices.

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